Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum

ABSTRACT

An integrated transport device for a wafer carrier includes: an evacuatable chamber for accommodating therein a wafer carrier having a front opening with a cover; a rotatable platform for placing the wafer carrier thereon in the chamber; and an opening/closing device for opening and closing the cover of the wafer carrier placed on the platform at a first position, wherein the platform rotates to set the wafer carrier at the first position and a second position for transporting a wafer to a wafer-handling chamber.

BACKGROUND OF THE INVENTION

Field of the Invention

The present invention generally relates to an apparatus and method for transporting wafers between a wafer carrier and a process tool under vacuum, including an apparatus and method for opening and closing a FOUP (front opening unified pod) under vacuum.

Description of the Related Art

Recently, some platforms for handling semiconductor wafers have begun opening/closing a FOUP in a N₂ atmosphere so as to reduce the number of particles adhering to wafers unloaded from and loaded to the FOUP. If the opening/closing of the FOUP is operated under vacuum, the particle issue is expected to be solved remarkably. However, the conventional opening/closing mechanism is designed for use in standard atmosphere, and is not operable under vacuum for the following reasons: The mainstay of semiconductor automation is shuttling products (e.g., silicon wafers or quartz photo-masks) between ultra-clean storage carriers (e.g., a FOUP) and a variety of process tools (e.g., processing, measurement, or testing chambers) through an equipment front end module (EFEM) such as a minienvironment. A FOUP is installed in a load port which is gas-tightly attached to a minienvironment via an interface. After the FOUP is connected to the minienvironment, a door of the FOUP facing the interior of the minienvironment opens to the interior by unlatching the door (releasing a lock of the door) and moving the door away from the FOUP and then moving it downward to fully open the FOUP. This process is illustrated in FIG. 1. FIG. 1 is a schematic representation of a conventional load port with a FOUP when a door of the FOUP is opened (the structure of a minienvironment is not shown). An opening/closing device (now shown) releases a door lock of a FOUP 1 installed in a load port 2 and holds a door 3, and then moves the door 3 downward to secure a space for robotic operation wherein the door is held in a support 4. In the above, the opening/closing device uses a motor for unlatching and moving the door. Since the moving parts including the motor are provided with grease which tends to evaporate under vacuum, the moving parts need to be sealed from the vacuum environment. However, the minienvironment uses standard atmosphere, and thus, it is difficult to completely seal the moving parts including the motor in its entirety while moving the door with complex operating mechanisms. Further, since the door is moved downward to open the FOUP, a significant amount of space is required for the vertical movement of the door. In this disclosure, the “door” may also be referred to as “cover”.

An object of the present invention is to resolve at least one of the above-addressed problems.

Any discussion of problems and solutions in relation to the related art has been included in this disclosure solely for the purposes of providing a context for the present invention, and should not be taken as an admission that any or all of the discussion was known at the time the invention was made.

SUMMARY OF THE INVENTION

In some embodiments, wafers are transported between a wafer carrier and a process tool under vacuum without using a minienvironment. In some embodiments, a load lock chamber is used for storing a wafer carrier. In some embodiments, the wafer carrier is a FOUP which is carried to the load lock chamber using an overhead vehicle (OHV) and is set directly on a platform inside the load lock chamber from the OHV. In some embodiments, the platform is rotatable in a horizontal direction and is movable in a vertical direction so that the following operation can be performed. The FOUP is loaded inside the load lock chamber (LLC) from a top opening of the LLC which is then evacuated, and an opening/closing device provided on a front wall of the LLC unlatches a door of the FOUP and slightly opens the door by creating a small gap between the door and the opening of the FOUP. After completing evacuation of the side of the FOUP through the gap, the opening/closing device opens the door of the FOUP completely, and holds it on the wall of the FOUP. The platform is then rotated so that the opening of the FOUP is positioned facing a back wall of the LLC which is attached to a wafer-handling chamber via a gate valve whereby a robotic arm provided in the wafer-handling chamber can reach wafers inside the FOUP through the opening of the FOUP and the gate valve. The above operation is performed under vacuum but need not use complex mechanisms since the opening/closing device unlatches the door of the FOUP and keeps the door in position without moving it downward, and by rotating the FOUP, the opening of the FOUP is set to face the gate valve for robotic access. In the above, the drive mechanism of the opening/closing device can be provided outside the LLC and can be operable in standard atmosphere although actual unlatching and moving of the door takes place inside the LLC. The above opening/closing mechanism can effectively solve the particle issue. Further, since the door is not moved vertically to open it, the inner volume of the LLC can be significantly reduced. Accordingly, the throughput is significantly improved.

For purposes of summarizing aspects of the invention and the advantages achieved over the related art, certain objects and advantages of the invention are described in this disclosure. Of course, it is to be understood that not necessarily all such objects or advantages may be achieved in accordance with any particular embodiment of the invention. Thus, for example, those skilled in the art will recognize that the invention may be embodied or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught herein without necessarily achieving other objects or advantages as may be taught or suggested herein.

Further aspects, features and advantages of this invention will become apparent from the detailed description which follows.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other features of this invention will now be described with reference to the drawings of preferred embodiments which are intended to illustrate and not to limit the invention. The drawings are greatly simplified for illustrative purposes and are not necessarily to scale.

FIG. 1 is a schematic representation of a conventional load port with a FOUP when a door of the FOUP is opened (the structure of a minienvironment is not shown).

FIG. 2 is a schematic representation of an integrated transport device according to an embodiment of the present invention.

FIGS. 3A to 3F are schematic representations showing steps of transporting wafers under vacuum according to an embodiment of the present invention.

FIG. 4 is a schematic representation of a semiconductor manufacturing apparatus using an integrated transport device according to an embodiment of the present invention.

FIG. 5 is a schematic representation of a semiconductor manufacturing apparatus disposed in alignment with an overhead vehicle according to an embodiment of the present invention.

FIG. 6 is a schematic representation of an opening/closing device according to an embodiment of the present invention, consisting of (a) a perspective view and (b) a cross sectional view.

FIG. 7 is a schematic representation of an opening/closing device according to another embodiment of the present invention, consisting of (a) a perspective view and (b) a cross sectional view.

DETAILED DESCRIPTION OF EMBODIMENTS

In this disclosure, “gas” may include vaporized solid and/or liquid and may be constituted by a single gas or a mixture of gases. Likewise, an article “a” or “an” refers to a species or a genus including multiple species. Further, in this disclosure, any two numbers of a variable can constitute a workable range of the variable as the workable range can be determined based on routine work, and any ranges indicated may include or exclude the endpoints. Additionally, any values of variables indicated (regardless of whether they are indicated with “about” or not) may refer to precise values or approximate values and include equivalents, and may refer to average, median, representative, majority, etc. in some embodiments. The term “constituted by” refers to “comprising”, “consisting essentially of”, or “consisting of” in some embodiments. The term “connected” refers to direct connection without any intervening parts or indirect connection with an intervening part, and includes physical, electrical, and functional connection in some embodiments. In the present disclosure where conditions and/or structures are not specified, the skilled artisan in the art can readily provide such conditions and/or structures, in view of the present disclosure, as a matter of routine experimentation. In all of the disclosed embodiments, any element used in an embodiment can be replaced with any elements equivalent thereto, including those explicitly, necessarily, or inherently disclosed herein, for the intended purposes. Further, the present invention can equally be applied to apparatuses and methods.

Further, in this disclosure, a pressure lower than the atmospheric pressure is called “vacuum”. The “load lock chamber” is a vacuum or evacuatable chamber installed for loading and unloading unprocessed and processed substrates to and from a process chamber while maintaining the process chamber at a vacuum without exposing the process chamber to the atmosphere. The load lock chamber is adapted to be attached to a wafer-handling chamber provided with a robotic arm or front end robot, and is equipped with a gate valve facing the wafer-handling chamber. In some embodiments, the load lock chamber is connected to an EFEM (equipment front end module), e.g., a wafer-handling chamber provided with a robotic arm, which is connected to a process tool. The “process tool” is a tool for processing wafers, and the processing includes, but is not limited to, depositing a film, etching, ashing, curing, etc. by plasma-assisted, thermal, or radical processing, or the like (e.g., plasma-enhanced CVD, thermal CVD, cyclic CVD, plasma-enhanced ALD, thermal ALD, radical-enhanced ALD, or any other thin film deposition methods).

In this disclosure, any defined meanings do not necessarily exclude ordinary and customary meanings in some embodiments.

According to some embodiments which solve at least one of the problems addressed herein, an integrated transport device for a wafer carrier comprises: (i) an evacuatable chamber for accommodating therein a wafer carrier having a front opening with a cover, said chamber having a rear opening with a gate valve, said rear opening with the gate valve being adapted to communicate gas-tightly with the interior of a wafer-handling chamber; (ii) a platform for placing the wafer carrier thereon in the chamber, said platform being rotatable so as to set the wafer carrier at a first position for opening and closing the cover and at a second position for transporting wafers between the wafer carrier and the wafer-handling chamber; and (iii) an opening/closing device for opening and closing the cover of the wafer carrier placed on the platform at the first position, said opening/closing device comprising an internal part provided inside the chamber and an external part provided outside the chamber, said internal part being extendable and retractable for opening and closing the cover, said external part actuating movement of the internal part.

Although the wafer carrier can be of any type, in some embodiments, the wafer carrier is a FOUP (front opening unified pod). The wafer carrier including a FOUP typically has multiple slots (e.g., 10 to 30 slots) arranged in parallel, each holding a wafer. Any suitable FOUPs including any conventional FOUPs can be used. Preferably, FOUPs which can be gas-tightly sealable are used so as to significantly alleviate the particle issues. If a FOUP is not gas-tightly sealable, after the FOUP is taken out from the evacuatable chamber after filling the FOUP with an inert gas to adjust the pressure to standard atmospheric pressure, the inert gas inside the FOUP is gradually replaced with air in standard atmosphere, contributing to the particle issues. However, in some embodiments, a FOUP which is not gas-tightly sealable can be used, depending on the environmental conditions and the requirements for wafers inside the FOUP.

In some embodiments, the internal part of the opening/closing device comprises a latching mechanism to latch the cover for opening and closing, and to hold the cover. The wafer carrier has a cover which is typically capable of being locked by setting a latch or latches. The latching mechanism of the opening/closing device can latch and unlatch the cover. Any suitable latching mechanisms including any conventional mechanisms can be use. The cover is typically completely separable from the FOUP body.

In some embodiments, the evacuatable chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the chamber. In some embodiments, the lid is operable to open from a closed position by moving upward and then rotating on a horizontal plane, and to close from an open position by rotating on the horizontal plane and then moving downward. When the evacuatable chamber has a top opening with a lid, the wafer carrier can be loaded to and unloaded from the chamber using a standard overhead vehicle.

In some embodiments, the opening/closing device is provided on a wall of the chamber opposite to the rear opening. Since the opening/closing device is provided on a standard atmosphere side, not on a vacuum side, the drive mechanism can be operable in standard atmosphere. Further, since the platform is rotatable, the position of the cover of the wafer carrier can be adjusted to as to face the opening/closing device, regardless of the initial position of the cover of the wafer carrier when loaded to the evacuatable chamber.

In some embodiments, the platform is movable in a vertical direction so that the platform can readily receive the wafer carrier at a top position, set the cover of the wafer carrier at an opening/closing position for opening/closing the cover using the opening/closing device, and set the slots of the wafer at a transferring position for transferring a wafer to a wafer-handling chamber using a robotic arm through a gate valve. Thus, even if the vertical movement of the robotic arm is restricted, a wafer can be transferred between the wafer carrier and the wafer-handling chamber.

In some embodiments, the chamber is provided with an exhaust line for evacuating the interior of the chamber so that the wafer transfer can be conducted under vacuum.

Another aspect of the present invention provides a semiconductor manufacturing apparatus comprising: (a) a wafer-handling chamber provided with a robotic arm for transferring a wafer; (b) at least one process chamber attached to the wafer-handling chamber wherein the process chamber is accessible by the robotic arm under vacuum; and (c) any one of the foregoing integrated transport devices attached to the wafer-handling chamber wherein the integrated transport device is accessible by the robotic arm under vacuum. The process chamber can be any suitable process chambers for processing including, but not limited to, depositing a film, etching, ashing, curing, etc. by plasma-assisted, thermal, or radical processing, or the like (e.g., plasma-enhanced CVD, thermal CVD, cyclic CVD, plasma-enhanced ALD, thermal ALD, radical-enhanced ALD, or any other thin film deposition methods).

Still another aspect of the present invention provides a method for transporting wafers between a wafer carrier and a process tool, using any one of the foregoing integrated transport devices attached to a wafer-handling chamber, said method comprising: (I) loading to the evacuatable chamber a wafer carrier having a front opening with a cover facing in a direction toward the wafer-handling chamber, wherein the wafer carrier is placed on the platform, and the rear opening of the chamber is closed by the gate valve; (II) then rotating the platform with the wafer carrier to set the wafer carrier at the first position for opening and closing the cover; (III) then evacuating the chamber and slightly opening the cover using the opening/closing device; (IV) then completely opening the cover using the opening/closing device and rotating the platform with the wafer carrier to set the wafer carrier at the second position for transporting wafers; and (V) then opening the gate valve and transporting wafers from the wafer carrier to the wafer-handling chamber for wafer-processing.

In some embodiments, the method further comprises, after the wafer-processing is complete: (VI) opening the gate valve and transporting wafers from the wafer-handling chamber to the wafer carrier; (VII) then rotating the platform with the wafer carrier to set the wafer carrier at the first position and closing the cover using the opening/closing device; (VIII) then breaking the vacuum of the chamber; (IX) then rotating the platform with the wafer carrier to set the wafer carrier at the second position, and (X) unloading the wafer carrier from the chamber.

In some embodiments, the wafer carrier is a FOUP (front opening unified pod). In some embodiments, the opening/closing device is provided opposite to the rear opening.

In some embodiments, the chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the chamber, and the platform is movable in a vertical direction, wherein the step of loading the wafer carrier comprises: opening the lid of the chamber, where the platform is at a top position for receiving the wafer carrier; and placing the wafer carrier on the platform; and the step of rotating the platform comprises: lowering and rotating the platform with the wafer carrier; and closing the lid.

In some embodiments, the chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the chamber, and the platform is movable in a vertical direction, wherein the step of breaking the vacuum comprises opening the lid of the chamber; the step of rotating the platform comprises rotating and raising the platform with the wafer carrier; and the step of unloading the wafer carrier comprises opening the lid, and lifting the wafer carrier.

In some embodiments, the platform is movable in a vertical direction, wherein the step of transporting wafers comprises: adjusting the height of the wafer carrier relative to the rear opening so that a wafer in the wafer carrier is accessible by a robotic arm installed in the wafer-handling chamber, and transporting the wafer from the wafer carrier to the wafer-handling chamber using the robotic arm.

In some embodiments, the platform is movable in a vertical direction, wherein the step of transporting wafers comprises: adjusting the height of the wafer carrier relative to the rear opening so that a wafer can be placed in an empty slot of the wafer carrier by a robotic arm installed in the wafer-handling chamber, and transporting the wafer from the wafer-handling chamber to the wafer carrier using the robotic arm.

In some embodiments, loading the wafer carrier to the chamber is conducted using an overhead vehicle (OHV).

Yet another aspect of the present invention provides a load lock chamber adapted to be attached to a wafer-handling chamber, comprising a rear opening with a gate valve for communicating gas-tightly with the interior of the wafer-handling chamber when the gate valve is open; and a platform for placing a wafer carrier thereon, said platform being movable in a vertical direction to adjust the height of the wafer carrier relative to the rear opening so that any wafer in the wafer carrier is accessible through the rear opening by a robotic arm installed in the wafer-handling chamber, and so that a wafer can be placed in any empty slot of the wafer carrier by the robotic arm.

In some embodiments, the wafer carrier is a FOUP (front opening unified pod), and the load lock chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the load lock chamber.

The embodiments will be explained with respect to preferred embodiments. However, the present invention is not limited to the preferred embodiments.

FIG. 2 is a schematic representation of an integrated transport device according to an embodiment of the present invention. The device is connected to a wafer-handling chamber 11 provided with a robotic arm 12, desirably in conjunction with controls programmed to conduct the sequences described below, which can be used in an embodiment of the present invention. The wafer-handling chamber 11 is designed to transfer a wafer under vacuum. The integrated transport device for a wafer carrier comprises: a load lock chamber 23 accommodating therein a FOUP 21 having a front opening with a cover (not shown), said chamber 23 having a rear opening 28 with a gate valve (not shown), said rear opening 28 with the gate valve being adapted to communicate gas-tightly with the interior of the wafer-handling chamber 11; a platform 20 for placing the FOUP 21 thereon in the chamber 23, said platform 20 being rotatable so as to set the FOUP 21 at a first position for opening and closing the cover and at a second position for transporting wafers between the FOUP 21 and the wafer-handling chamber 11; and an opening/closing device 22 for opening and closing the cover of the FOUP 21 placed on the platform 20 at the first position, said opening/closing device 22 being provided on a wall of the chamber 23 corresponding to the first position. The load lock chamber 23 has a top opening 26 with a lid 27, for loading and unloading the FOUP 21 to and from the chamber 23. The lid 27 can rotate and also move vertically, using an actuator 29. The lid 27 is operable to open from a closed position by moving upward and then rotating on a horizontal plane (so as to prevent degradation of an O-ring), and to close from an open position by rotating on the horizontal plane and then moving downward, using an actuator 29. For closing the lid 27, the above steps are conducted in the reversed order (i.e., rotating the lid and then moving it downward). The opening/closing device 22 is provided opposite to the rear opening 28. However, the opening/closing device 22 can be provided at another side of the chamber 23, depending on the entire configuration of the apparatus. The chamber 23 and the lid 27 have a square shape as viewed from above. However, they can be of another polygonal shape, circular shape, oval shape, or the like, although the opening/closing device 22 has a flat face facing the FOUP 21. The platform 20 is not only rotatable but also movable in a vertical direction by a drive 25. The opening/closing device 22 comprises a latching mechanism to latch the cover for opening and closing, and to hold the cover as described below. The opening/closing device 22 also can move toward the cover of the FOUP 21 to contact the cover for latching and unlatching operation, and can move away from the FOUP 21 when the device holds the cover thereon and the FOUP 21 rotates. The chamber 23 is provided with an exhaust line for evacuating the interior of the chamber through an opening 24. The chamber 23 is not capable of processing a wafer and is not equipped with devices for processing a wafer.

A skilled artisan will appreciate that the apparatus includes one or more controller(s) (not shown) programmed or otherwise configured to cause the operation described below. The controller(s) are communicated with the various power sources, pumps, robotics and gas flow controllers or valves, as will be appreciated by the skilled artisan.

FIGS. 3A to 3F are schematic representations showing steps of transporting wafers under vacuum according to an embodiment of the present invention.

In FIG. 3A, a FOUP 32 loaded with a plurality of wafers is carried by an overhead vehicle (OHV) 31 to a position directly above a load lock chamber 34. Since the OHV 31 may carry the FOUP 32 to other apparatuses for other processing, which normally require a cover 40 facing in a direction toward the apparatuses, the FOUP 32 is suspended from the OHV 31 in such a way that the cover 40 faces in a direction toward a wafer-handling chamber 36 which is evacuated. As described above in relation to FIG. 2, this integrated transport device also comprises the load lock chamber 34 provided with the platform 33 which is rotatable along its axis and movable vertically, using a drive 41. The chamber 34 is equipped with a lid 37 and connected to a vacuum pump 35. An opening/closing device 38 is installed on a wall of the chamber 34 opposite to a wall connected to the wafer-handling chamber 36. The chamber 34 has a rear opening with a gate valve 39 through which a wafer is transported between the chamber 34 and the wafer-handling chamber 36 using a robotic arm 30 provided in the wafer-handling chamber 36. In the above, the rear opening of the chamber 34 is closed by the gate valve 39.

In FIG. 3B, the FOUP 32 is moved downward by the OHV 31 and is placed on the platform 33, while the cover 40 faces in the direction toward the wafer-handling chamber 36.

In FIG. 3C, the platform 33 descends with the FOUP 32 while rotating along the axis of the platform 33 so as to set the FOUP 32 at a first position for opening and closing the cover 40 using the opening/closing device 38. The platform 33 is provided with three pins, for example, as regulated by the SEMI Standards provided by SEMI (the global industry association), which pins are fitted in holes provided on a bottom face of the FOUP 32 so that the platform 33 and the FOUP 32 are interlocked and rotate together.

In FIG. 3D, the lid 37 is rotated to be set directly above the top opening and is moved downward to gas-tightly seal the top opening. The opening/closing device 38 moves toward the FOUP 32 and contacts the cover 40 so as to unlock the cover, and then is retracted so as to slightly open the cover 40 of the FOUP 32 while the opening/closing device 38 holds the cover 40. The load lock chamber 34 is then evacuated using the vacuum pump 35. The FOUP 32 is evacuated through the gap formed by slightly opening the cover 40.

In FIG. 3E, after the evacuation of the FOUP 32 and the chamber 34 is complete, the cover 40 is completely opened using the opening/closing device 38 and the platform 33 is rotated with the FOUP 32 using a drive 41 and is moved downward to set the FOUP 32 at a second position for transporting wafers, wherein the front opening of the FOUP 32 faces the rear opening with the gate valve 39 which is now opened (an opening 42 is formed between the chamber 34 and the wafer-handling chamber 36). Since the opening/closing device 38 holding the cover 40 is retracted, it does not interfere with the rotating movement of the FOUP 32.

In FIG. 3F, a wafer 43 is transported using the robotic arm 30 from the FOUP 32 to the wafer-handling chamber 36 through the opening 42 under vacuum. The wafer 43 is then transported to a processing chamber (not shown) for wafer-processing.

After the wafer-processing is complete, the steps are performed in the reversed order, i.e., opening the gate valve 39 and transporting a wafer 43 from the wafer-handling chamber 36 to the FOUP 32; then closing the gate valve 39 and rotating the platform 33 with the FOUP 32 to set the FOUP 32 at the first position so as to close the cover 40 using the opening/closing device 38; then breaking the vacuum of the chamber 34; then rotating the platform 33 with the FOUP 32 to set the FOUP 32 at the second position, and unloading the FOUP 32 from the chamber 34.

FIG. 4 is a schematic representation of a semiconductor manufacturing apparatus using an integrated transport device according to an embodiment of the present invention, wherein a load lock chamber 57 is connected to a wafer-handling chamber 46 to which processing chambers 45 also are connected. No minienvironment or any other intervening chambers are provided between the load lock chamber 57 and the wafer-handling chamber 46. The load lock chamber 57 is provided with a lid 50 which is rotatable on an axis 51 by an actuator for opening a top opening of the load lock chamber 57 so that a FOUP 54 containing wafers 55 is loaded to and unloaded from the load lock chamber 57. The lid 50 to the load lock chamber 57 to the right in this figure is shown as open solely for the purpose of showing the interior of the load lock chamber 57 (since a cover 56 is separated from the FOUP 54 in this figure, the lid 50 must be closed in reality). The FOUP 54 is placed on a platform 53 and is set at the first position so that a cover 56 is opened by attaching the cover 56 to an opening/closing device 52 and separating it from the FOUP 54. A rear opening 49 of the load lock chamber 57 is closed by a gate valve 48 in this figure. When the FOUP 54 is set at the second position where the front opening faces the gate valve 48, the gate valve 48 opens, and a wafer 55 can be transported using the robotic arm 47 between the load lock chamber 57 and the wafer-handling chamber 46 through the rear opening 49. Further, the wafer 55 is transported between the wafer-handling chamber 46 and each process chamber 45 through the corresponding gate valve (not shown). In this figure, two load lock chambers 50 are provided, four process chambers 45 are provided, and one wafer-handling chamber 46 is provided. However, the number of each chamber need not be limited thereto, and can be adjusted according to the desired configuration of the apparatus. For example, the wafer-handling chamber can be more than 4-sided, e.g., 5-sided, 6-sided, 7-sided, or 8-sided, and a single chamber or a pair of chambers can be connected to each side of the wafer-handling chamber except for the side to which the load lock chamber(s) is/are attached.

FIG. 5 is a schematic representation of a semiconductor manufacturing apparatus disposed in alignment with an overhead vehicle according to an embodiment of the present invention. In this figure, the apparatus using the integrated transport device according to an embodiment is aligned with other processing apparatuses 61 so that an overhead vehicle (OHV) 62 can carry a FOUP 63 from one apparatus to another, wherein each chamber which receives the FOUP 63 descending from above is aligned along a line 67 along which the OHV 62 moves to carry the FOUP 63 from one chamber to another. The apparatus according to an embodiment is provided with the integrated transport device 66 according to an embodiment and also is provided with the process chambers 45 which are connected to the wafer-handling chamber 46. The integrated transport device 66 receives the FOUP 63. Each other apparatus is provided with a load port 65 which receives the FOUP 63. The load port 65 is connected to a minienvironment 68. Since the other apparatuses require the FOUP 63 to be set in such a way that a cover 64 of the FOUP 63 faces each apparatus, when transporting the FOUP 63 using the OHV 62 to the load lock chamber 66, the FOUP 63 also faces the apparatus (i.e., facing the wafer-handling chamber), so that the FOUP 63 can be continuously transported from one apparatus to another. In the above, the line 62 need not be a straight line but can be bent or curved, depending on the system configurations of the OHV and the apparatuses arranged in the site.

If no other apparatus is associated with the apparatus using the integrated transport device, and an OHV carries a FOUP solely for the apparatus, or if another apparatus associated with the apparatus using the integrated transport device accepts a FOUP whose cover faces opposite to the apparatus, the FOUP can be carried by the OHV in such a way that the FOUP is placed on the platform while the cover faces the opening/closing device (i.e., facing opposite to the apparatus), which eliminates rotation of the platform in FIG. 3C. Further, the FOUP can be placed on the platform by means other than an OHV, e.g., by a carrier with casters. In such an embodiment, an opening of the opening/closing device for loading a FOUP thereto need not be arranged on the top of the device, but can be on a side.

FIG. 6 is a schematic representation of an opening/closing device according to an embodiment of the present invention, consisting of (a) a perspective view and (b) a cross sectional view. This opening/closing device comprises an internal part and an external part separated by a front wall 79 of the load lock chamber and sealed from each other by O-rings 80 as illustrated in (b) in FIG. 6. The external part comprises a plate 74 having through holes provided with O-rings 80, and shafts with latch keys 71 inserted through the through holes with O-rings 80. Each latch key 71 functions as a key to lock and unlock the cover of a FOUP by turning the latch key by 90°, for example, wherein the cover has a latching mechanism which is controlled by operation of the latch keys 71. The external part comprises step motors 73 and cylinder motors 72. Each latch key 71 rotates using the step motor 73 provided on the shaft so that the cover is locked and unlocked. The plate 74 is movable back and forth using the cylinder motors 72. The plate 74 is provided on a vacuum side while the cylinder motors 72 and the step motors 73 are provided on an atmosphere side which is separated from the vacuum side by the front wall 79 of the load lock chamber, so that the plate 74 can be connected to the cover of a FOUP using the latch keys 71 and can lock and unlock the cover and also can move the cover away from the front opening of the FOUP and move the cover toward the front opening of the FOUP to seal the front opening under vacuum, while all actuating operation takes place under ambient atmospheric pressure. In some embodiments, the latching mechanism regulated by the SEMI Standards can be used. Although two latch keys are typically used for locking, unlocking, and holding the cover, the number of the latch keys can be adjusted, depending on the configuration of the cover (in some embodiments, three or more latch keys are used).

According to the SEMI Standards, the plate 74 has a shape fitted to an opening of a conventional load port so that the plate 74 can seal the opening when a FOUP is detached from the load port, thereby preventing gas from entering into a minienvironment from the outside. However, as illustrated in FIGS. 3A to 3F, since a FOUP is stored inside a load lock chamber and its cover opens and is closed under vacuum, a plate is not required to function as a seal and thus can be significantly smaller than the plate 74 as illustrated in FIG. 7. FIG. 7 is a schematic representation of an opening/closing device according to another embodiment of the present invention, consisting of (a) a perspective view and (b) a cross sectional view. A plate 77 is much smaller than the plate 74. Further, a shaft with a latch key 78 is provided with not only a step motor 75 but also with a cylinder motor 76, so that the shaft can rotate and also move back and forth with a simpler configuration than that in FIG. 6.

It will be understood by those of skill in the art that numerous and various modifications can be made without departing from the spirit of the present invention. Therefore, it should be clearly understood that the forms of the present invention are illustrative only and are not intended to limit the scope of the present invention. 

I claim:
 1. An integrated transport device for a wafer carrier, comprising: an evacuatable chamber for accommodating therein the wafer carrier having a front opening with a cover, said evacuatable chamber having a rear opening with a gate valve, said rear opening with the gate valve being adapted to communicate gas-tightly with the interior of a wafer-handling chamber; a platform for placing the wafer carrier thereon in the evacuatable chamber, said platform being rotatable so as to set the wafer carrier at a first position for opening and closing the cover and at a second position for transporting wafers between the wafer carrier and the wafer-handling chamber; and an opening/closing device for opening and closing the cover of the wafer carrier placed on the platform at the first position, said opening/closing device being provided in a wall of the evacuatable chamber facing the cover of the wafer carrier, said opening/closing device comprising an internal part provided on an inner side of the wall of the evacuatable chamber and an external part provided on an outer side opposite to the inner side of the wall of the evacuatable chamber, said internal part being extendable and retractable for opening and closing the cover, said external part actuating movement of the internal part, wherein the platform is movable in a vertical direction, the evacuatable chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the evacuatable chamber, and the evacuatable chamber is provided with an exhaust line for evacuating the interior of the evacuatable chamber.
 2. The integrated transport device according to claim 1, wherein the wafer carrier is a FOUP (front opening unified pod).
 3. The integrated transport device according to claim 1, wherein the lid is operable to open from a closed position by moving upward and then rotating on a horizontal plane, and to close from an open position by rotating on the horizontal plane and then moving downward.
 4. The integrated transport device according to claim 1, wherein the opening/closing device is provided on a wall of the evacuatable chamber opposite to the rear opening.
 5. The integrated transport device according to claim 1, wherein the internal part of the opening/closing device comprises a latching mechanism to latch the cover for opening and closing, and to hold the cover.
 6. A semiconductor manufacturing apparatus using the integrated transport device of claim 1, comprising: the wafer-handling chamber provided with a robotic arm for transferring the wafer; at least one process chamber attached to the wafer-handling chamber wherein the process chamber is accessible by the robotic arm under vacuum; and the integrated transport device attached to the wafer-handling chamber wherein the integrated transport device is accessible by the robotic arm under vacuum.
 7. A load lock chamber constituted by the integrated transport device of claim 1, which is attached to the wafer-handling chamber, wherein said platform is movable in the vertical direction to adjust the height of the wafer carrier relative to the rear opening so that any wafer in the wafer carrier is accessible through the rear opening by a robotic arm installed in the wafer-handling chamber, and so that a wafer of said any wafer can be placed in any empty slot of the wafer carrier by the robotic arm.
 8. The load lock chamber according to claim 7, wherein the wafer carrier is a FOUP (front opening unified pod).
 9. A method for transporting wafers between a wafer carrier and a process tool, using the integrated transport device of claim 1 attached to a wafer-handling chamber, said method comprising: loading to the evacuatable chamber a wafer carrier having a front opening with a cover facing in a direction toward the wafer-handling chamber, wherein the wafer carrier is placed on the platform, and the rear opening of the chamber is closed by the gate valve; then rotating the platform with the wafer carrier to set the wafer carrier at the first position for opening and closing the cover; then evacuating the chamber and slightly opening the cover using the opening/closing device; then completely opening the cover using the opening/closing device and rotating the platform with the wafer carrier to set the wafer carrier at the second position for transporting wafers; and then opening the gate valve and transporting wafers from the wafer carrier to the wafer-handling chamber for wafer-processing.
 10. The method according to claim 9, further comprising, after the wafer-processing is complete: opening the gate valve and transporting wafers from the wafer-handling chamber to the wafer carrier; then rotating the platform with the wafer carrier to set the wafer carrier at the first position and closing the cover using the opening/closing device; then breaking the vacuum of the chamber; then rotating the platform with the wafer carrier to set the wafer carrier at the second position, and unloading the wafer carrier from the chamber.
 11. The method according to claim 9, wherein the wafer carrier is a FOUP (front opening unified pod).
 12. The method according to claim 9, wherein the opening/closing device is provided opposite to the rear opening.
 13. The method according to claim 9, wherein the chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the chamber, and the platform is movable in a vertical direction, wherein the step of loading the wafer carrier comprises: opening the lid of the chamber, where the platform is at a top position for receiving the wafer carrier; and placing the wafer carrier on the platform; and the step of rotating the platform comprises: lowering and rotating the platform with the wafer carrier; and closing the lid.
 14. The method according to claim 9, wherein the platform is movable in a vertical direction, wherein the step of transporting wafers comprises: adjusting the height of the wafer carrier relative to the rear opening so that a wafer in the wafer carrier is accessible by a robotic arm installed in the wafer-handling chamber, and transporting the wafer from the wafer carrier to the wafer-handling chamber using the robotic arm.
 15. The method according to claim 9, wherein loading the wafer carrier to the chamber is conducted using an overhead vehicle (OHV).
 16. The method according to claim 10, wherein the chamber has a top opening with a lid, for loading and unloading the wafer carrier to and from the chamber, and the platform is movable in a vertical direction, wherein the step of breaking the vacuum comprises opening the lid of the chamber; the step of rotating the platform comprises rotating and raising the platform with the wafer carrier; and the step of unloading the wafer carrier comprises opening the lid, and lifting the wafer carrier.
 17. The method according to claim 10, wherein the platform is movable in a vertical direction, wherein the step of transporting wafers comprises: adjusting the height of the wafer carrier relative to the rear opening so that a wafer can be placed in an empty slot of the wafer carrier by a robotic arm installed in the wafer-handling chamber, and transporting the wafer from the wafer-handling chamber to the wafer carrier using the robotic arm. 